Description
Characteristics:
100*100*100 um travel range
Very compact
Open and closed-loop versions
Built-in high-performance piezo ceramic
Fast scanning and settling
Applications:
Scanning systems
Mechanical engineering, micromachining
Fiber positioning,laser optics
Macromanipulation,fiber-alignment
Optics, photoelectron
Types XP-611.XYZS XP-611.XYZO Units
Active axes X,Y,Z X,Y,Z
Open-loop travel range(0~150V) 100/axis 100/axis um+/-20%
Closed-loop travel range 100/axis - um+/-20%
Integrated sensor SGS -
Open/closed-loop resolution(16bit) 4/7 4/- nm
Open/closed-loop resolution(24bit) 0.2/2 0.2/- nm
Linearity, closed-loop 0.2 - %F.S.
Repeatability 0.05 - %F.S.
Stiffness in motion direction 0.3 0.3 N/um+/-20%
Max. load 1 1 kg
Electrical capacitance 1.8/axis 1.8/axis uF+/-20%
Unloaded response frequency 300/260/200 300/260/200 Hz+/-20%
Operating temperature range -20~80 -20~80 Celsius
Voltage/sensor connection LEMO LEMO
Mass 170 170 g+/-5%
Material S/Al S/Al
Dimensions 35*35*47 35*35*47 mm
Spec |
high resolution, closed loop version, XYZ moving |
Quantity |
1pc |
Price |
$5000 FOB Harbin Airport |
Package |
carton |