P76 Large Loading Z Scanner Micro Piezo Actuator for Total Station Piezoelectric Laser Scanner

See Larger Picture : P76 Large Loading Z Scanner Micro Piezo Actuator for Total Station Piezoelectric Laser Scanner

Company Name:CoreMorrow Ltd.
Membership:Free Member
Member Since:2012. 06.08
Country/Region:China
City:Heilongjiang
Contact:CoreMorrow
Related Keywords:Piezo Actuator, Objective positioner

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Product Details

Quick Information

Place of Origin: China
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Description

http://www.coremorrow.com/en/

P76 series piezoelectric objective scanner features a large load capacity up to 500g, Z-axis linear motion range up to 100μm, adopting flexible hinge design mechanism, no friction, good linearity, high closed-loop positioning accuracy. The seperate thread adapter design accommodates a wide range of microscopes.

Characteristics

Travel to 100μm	Load capacity to 500g	Millisecond response time	Closed loop for higher repeatability
Excellent focusing stability

Applications

Adjustment focus	Image processing	Confocal microscope	Semiconductor inspection
Laser processing	Interference shape measurement

Technical data
Models	S-Closed loop K-Open loop	P76.Z100S P76.Z100K	P76.Z50S P76.Z50K	Units
Active axis		Z	Z
Travel range（0~120V）		80	60	μm±20%
Travel range（0~150V）		100	75	μm±20%
Sensor type		SGS/-	SGS/-
Resolution		5/2.5	15/2.5	nm
Linearity		0.05/-	0.1/-	%F.S.
Repeatability		0.02/-	0.05/-	%F.S.
Push/pull force		70/10	-	N
Stiffness		0.8	-	N/μm±20%
Unloaded resonant frequency		800	1800	Hz±20%
Unloaded step time		5/2	1.6/1	ms±20%
Closed-loop unloaded operating frequency	10% travel	400	-	Hz±20%
Closed-loop unloaded operating frequency	100% travel	50	-	Hz±20%
Load capacity		0.5	0.5	kg
El.capacitance		7.2	7.2	μF±20%
Material		Aluminum, Steel
Mass		520	550	g±5%

Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.

Certificates

CE : 000220190311

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